发明名称 PROCESS AND APPARATUS FOR THE PLANARIZING OF ROUGH, STRUCTURED OR HETEROGENEOUS SURFACES
摘要 A process and an apparatus for the planarizing of rough, structured or heterogeneous surfaces with a leveling layer. A cover layer permeable to energy radiation is laminated by means of a film pressing device, which comprises a sliding shoe and a feed device, on to a substrate base bearing the surface to be planarized. During lamination, the contact zone between the film pressing device and the substrate base forms a tapering laminating nip, which is constantly supplied with the organic coating material forming a film or layer.
申请公布号 CA2010219(A1) 申请公布日期 1990.08.17
申请号 CA19902010219 申请日期 1990.02.16
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 HIERHOLZER, BERNHARD;HAAS, RAIMUND;SPIESS, WOLFGANG
分类号 B05C11/02;B05D1/42;B05D3/00;B05D3/06;B29C65/52;B29L9/00;B32B43/00;H01L21/48;H05K3/06 主分类号 B05C11/02
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