发明名称 |
PROCESS AND APPARATUS FOR THE PLANARIZING OF ROUGH, STRUCTURED OR HETEROGENEOUS SURFACES |
摘要 |
A process and an apparatus for the planarizing of rough, structured or heterogeneous surfaces with a leveling layer. A cover layer permeable to energy radiation is laminated by means of a film pressing device, which comprises a sliding shoe and a feed device, on to a substrate base bearing the surface to be planarized. During lamination, the contact zone between the film pressing device and the substrate base forms a tapering laminating nip, which is constantly supplied with the organic coating material forming a film or layer. |
申请公布号 |
CA2010219(A1) |
申请公布日期 |
1990.08.17 |
申请号 |
CA19902010219 |
申请日期 |
1990.02.16 |
申请人 |
HOECHST AKTIENGESELLSCHAFT |
发明人 |
HIERHOLZER, BERNHARD;HAAS, RAIMUND;SPIESS, WOLFGANG |
分类号 |
B05C11/02;B05D1/42;B05D3/00;B05D3/06;B29C65/52;B29L9/00;B32B43/00;H01L21/48;H05K3/06 |
主分类号 |
B05C11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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