| 摘要 |
PURPOSE:To increase the polarity-reversing frequency of a ferroelectric material to an almost infinite level and to improve the stability and reliability of a ferroelectric element by adding fluorine to a ferroelectric material. CONSTITUTION:Fluorine is included in a ferroelectric material such as Pb-Zr-Ti oxide or gadolinium molybdate to increase the polarity-reversing frequency of the ferroelectric material and solve the problem such as deterioration of the ferroelectric material caused by the polarity reversion. A concrete method for including fluorine is e.g. the formation of a ferroelectric membrane such as Pb-Zr-Ti oxide membrane on a substrate by sputtering followed by the implantation of fluoride ion or fluorine plasma treatment. In the case of forming a single crystal of a ferroelectric material such as gadolinium molybdate by pull-up process, etc., the inclusion of fluorine in the ferroelectric crystal can be performed by mixing fluorine gas or hydrofluoric acid gas, etc., to atmospheric gas. |
