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发明名称
TRANSIENT CAPACITANCE SPECTROSCOPING METHOD AND EQUIPMENT THEREFOR
摘要
申请公布号
JPH02207544(A)
申请公布日期
1990.08.17
申请号
JP19890026541
申请日期
1989.02.07
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
ANDOU TAKASHI;KATSUI AKINORI
分类号
G01N21/00;H01L21/66
主分类号
G01N21/00
代理机构
代理人
主权项
地址
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