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发明名称
PROBE CARD
摘要
申请公布号
JPH02206765(A)
申请公布日期
1990.08.16
申请号
JP19890026948
申请日期
1989.02.06
申请人
GIGA PUROOBU KK
发明人
IKEUCHI HARUNOBU;OKUMURA SANEYOSHI
分类号
G01R31/26;G01R1/073;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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地址
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