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发明名称
METHOD OF EVALUATING RELIABILITY OF OXIDE FILM
摘要
申请公布号
JPH02205047(A)
申请公布日期
1990.08.14
申请号
JP19890024215
申请日期
1989.02.02
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
URAOKA KOUJI;NAKADA YOSHIRO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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