发明名称 |
Apparatus for vaporizing monomers that flow at room temperature |
摘要 |
An evaporator chamber has an entry end with a conduit connected to the output of a mass flow regulator, an exit end connected to a vacuum, and a wall surface extending therebetween. A body having capillary action is disposed in the chamber and has one end connected to the conduit and a free surface spaced from the wall surface in line of sight thereof. Heating means for the wall surface heats the body radiantly and causes monomer carried thereby to evaporate.
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申请公布号 |
US4947789(A) |
申请公布日期 |
1990.08.14 |
申请号 |
US19880267077 |
申请日期 |
1988.11.04 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
HUSSLA, INGO;RITTER, JOCHEN |
分类号 |
C30B25/14;C23C16/44;C23C16/448 |
主分类号 |
C30B25/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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