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发明名称
CHARGED PARTICLE MULTI-BEAM PATTERN DRAWING DEVICE
摘要
申请公布号
JPH02205012(A)
申请公布日期
1990.08.14
申请号
JP19890024508
申请日期
1989.02.02
申请人
NIPPON SEIKO KK
发明人
SAIDA MASAHIRO;ANDO MASAAKI;MATSUZAKA MASAAKI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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