| 摘要 |
PURPOSE:To allow the easy automatic detection and visual discrimination of the front and rear surfaces as well as vertical and lateral directions of the mask by providing prescribed marks to the mask. CONSTITUTION:A mask substrate 11 for the exposing device is provided with the marks for identifying the front and rear surfaces as well as vertical and lateral directions of the mask 11, e.g.; notches 12, marks 22, etc. The marks 22 may be made into a rectangular shape or character. The automatic detection and visual discrimination of the mask are then facilitated. |
