| 摘要 |
PURPOSE:To enhance manufacturing efficiency and to perform continuous production, in a method for producing ultrafine particles using high frequency induction plasma, by directly supplying a powdery raw material in a plasma flame. CONSTITUTION:When ultrafine particles are produced using high frequency induction plasma, the emitting orifice of a raw material supply pipe 6 is provided within a high frequency induction coil region 4. Further, the connection part 12 of the plasma generation pipe 2 and a chamber 1 provided under the high frequency induction coil region 4 is formed so that the diameter thereof becomes large toward an outlet. Then, a powdery raw material 7 is directly supplied into a plasma flame 9. As a result, manufacturing efficiency can be enhanced and continuous production becomes possible. |
