| 摘要 |
PURPOSE:To prevent the generation of a distorsion on reflecting means and of a dielectric breakdown due to a heat conveyed to an actuator with a simple construction by cooling a reflecting means with a blowing of cooling gas. CONSTITUTION:A cooling gas 34 is sprayed on the surface of the 1st and 2nd mirrors 16, 18 from a gas nozzle 32 in a working head 10 of a laser beam machine. As a loss in reflection of a laser beam 8, therefore, the heat generated at the 1st and 2nd mirrors 16, 18 is carried away by a cooling gas 34 and the 1st and 2nd mirrors 16, 18 are not over-heated in a laser beam machine of a big output. |
