| 摘要 |
PURPOSE:To enable the control of laser rays in wavelength without making laser rays fluctuate in output by a method wherein a wide band etalon is controlled to move laterally by a specified angle to laser rays centering on a current angle every fixed interval, the controlled variable of a control section is detected at an initial angle and laterally controlled angles, and the angle of wide band etalon is so controlled as to make the controlled variable minimum. CONSTITUTION:A Fabry-Perot etalon (wide band etalon) 4 wide in transmission band is controlled to move laterally by a specified angle to laser rays centering on a current angle every certain interval, the controlled variable of a control section 10 is detected at an initial angle and laterally controlled angles, and the angle of the wide band etalon 4 is so controlled to make the controlled variable minimum. By this setup, even if the angle of the wide band etalon 4 to laser rays is varied to control laser rays in wavelength, an output controlling function of the laser device is kept working, so that the output of laser rays can be kept at a preset output value and laser rays can be stably controlled in wavelength. |
