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发明名称
MANUFACTURE OF POLYCRYSTALLINE SILICON THIN FILM
摘要
申请公布号
JPH02202018(A)
申请公布日期
1990.08.10
申请号
JP19890021630
申请日期
1989.01.31
申请人
TONEN CORP
发明人
KAKIGI HISASHI;NAGAHARA TATSURO;FUKUI KEITARO
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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