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发明名称
MOVABLE CONTILEVER TYPE PURGING METHOD AND ELEPHANTS PIPE AND ITS PURGING SYSTEM
摘要
申请公布号
JPH02201919(A)
申请公布日期
1990.08.10
申请号
JP19890315115
申请日期
1989.12.04
申请人
KURAIKO TOUENTEITOUU INC
发明人
KUREON AARU IEITSU
分类号
H01L21/22;H01L21/00;H01L21/677
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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