METHOD AND DEVICE FOR ABSORBING SHOCK WAVE FORM MASK

摘要

PURPOSE: To prevent the defect caused by the 'sudden separation' operation of a mask by separating a structure from the mask so that the mask is separated from the structure under control and applying opposed force to the mask at the same time. CONSTITUTION: A brake assembly is arranged on the uppermost part of a mask 12 to come into contact with the upper surface of the mask 12. The force applied by an additional wt. 38 is increased and decreased to make it possible to supply the min. force necessary for preventing paste spike formation by controlled separation and mask/green sheet separation. The position of a brake pad 20 or a brake sleeve 22 can be altered by the brake wt. 36 connected to the assembly regulable in a vertical direction. In order to screen a green sheet 16, a separate apparatus is used. After the green sheet 16 is screened but before a table 14 is lowered, the brake pad 20 is brought into contact with the surface of the mask 12. The brake sleeve 22 is engaged with a slidable brake shaft 34 and they are moved along with the movement of the mask 12.