| 摘要 |
PURPOSE:To prevent a superconductive thin film from deteriorating in characteristics by a method wherein the material of a first and a second metal oxide superconductive thin film is made from a composite compound such as Bi-Sr-Ca-Cu-O or the like and the material of a barrier layer is made from a Bi oxide compound of layered structure. CONSTITUTION:The material of a first and a second metal oxide superconductive thin films 2 and 6 is composite compound such as Bi-Sr-Ca-Cu-O, Bi-Pb-Sr-Ca-Cu-O, A-B-Cu-O, or A-B-Cu-O-S, where A denotes at least one of Sc, Y, La, and La series elements (atomic number 57-71 excluding 58, 59, and 61) and B represents at least one of IIa elements such as Ba and Sr. And, the concentrations of A, B, and Cu elements are so set as to satisfy a formula, 0.5<=(A+B)/Cu<=2.5. The material of a barrier layer 3 is a Bi compound of layered structure which contains at least one of Ti, Nb, Ta, and W. By this setup, a superconductive thin film can be prevented from deteriorating in characteristics. |
