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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH02200780(A)
申请公布日期
1990.08.09
申请号
JP19890019633
申请日期
1989.01.31
申请人
TOSHIBA CORP
发明人
SHOROKU TAKESHI
分类号
C23C16/02;C23C16/50
主分类号
C23C16/02
代理机构
代理人
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