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发明名称
VERFAHREN ZUR HERSTELLUNG VON HOCHREINEN, GEZIELT DOTIERTEN AIII-BV EPITAXIESCHICHTEN
摘要
申请公布号
DD281480(A5)
申请公布日期
1990.08.08
申请号
DD19870310636
申请日期
1987.12.17
申请人
KARL-MARX-UNIVERSITAET,DD
发明人
SEIFERT,WERNER,DD;PICKENHAIN,RAINER,DD;SCHWETLICK,STACIA,DD
分类号
H01L21/205;H01L21/22;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
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