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发明名称
THIN FILM FORMING APPARATUS AND ION SOURCE UTILIZING PLASMA SPUTTERING
摘要
申请公布号
EP0328033(A3)
申请公布日期
1990.08.08
申请号
EP19890102042
申请日期
1989.02.06
申请人
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人
MATSUOKA, MORITO;ONO, KEN'ICHI
分类号
C23C14/32;C23C14/35;H01J37/08;(IPC1-7):C23C14/34;H01J37/34
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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