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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH02199862(A)
申请公布日期
1990.08.08
申请号
JP19890019145
申请日期
1989.01.27
申请人
NEC CORP
发明人
HIRATA KAZUMI
分类号
H01L21/76;H01L21/822;H01L27/04;H01L27/08;H01L29/92
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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