| 摘要 |
<p>There is disclosed a force detector for detecting forces exerted in axial directions or moments exerted about respective axes using the origin (P) as a working point in an XYZ three-dimensional coordinate system. On the upper surface of the substrate (10), four bridge portions (11 to 14) are formed along the positive and negative directions of respective coordinate axes, and resistance elements (R1 to R24) having a property such that an electric resistance varies due to a mechanical deformation are arranged on predetermined symmetric positions of respective bridge portions. Bridge circuits are constructed by these resistance elements, and detection of a force is made by bridge voltage produced in the bridge circuit. A strain generative body (20) is used in order to transmit an external force to the substrate. This strain generative body is provided with a first flexible portion (23) having a sufficient flexibility with respect to the Z-axis direction and a second flexible portion (24) having a sufficient flexibility with respect to the direction perpendicular to the Z-axis, thus permitting detection sensitivities with respect to respective axes to be made uniform.</p> |
