发明名称 |
Universal object holder for microscopes |
摘要 |
An object holder for use on a microscope exhibits a frame having a shaped-on, deeper-lying contact surface, in which air suction openings are disposed for the fixing of the respective object. An adjustable abutment strip with a shaped-on bearing surface is provided, in order to retain plate-shaped objects, especially wafers or masks of the most widely varying shapes and sizes.
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申请公布号 |
US4946266(A) |
申请公布日期 |
1990.08.07 |
申请号 |
US19880245147 |
申请日期 |
1988.09.16 |
申请人 |
ERNST LEITZ WETZLAR GMBH |
发明人 |
KRAFT, WINFRIED;WUERFEL, VOLKER;STEBEL, WOLFRAM;MAERZHAEUSER, HEINZ |
分类号 |
H01L21/67;G02B21/26 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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