发明名称 |
THIN-FILM MADE OF CONTINUOUS DIAMOND AND MAKING THEREOF |
摘要 |
<p>A continuous thin diamond film having a thickness of less than about 2 microns has a low leakage. The thin diamond film may be supported on a supporting grid and may be incorporated into an X-ray window. The film may be formed in a DC assisted CVD process where in a first phase a relatively high concentration of a carbonaceous gas is introduced into the reactor and in a second phase the concentration of the carbonaceous gas is reduced to a lower value.</p> |
申请公布号 |
JPH02199099(A) |
申请公布日期 |
1990.08.07 |
申请号 |
JP19890274774 |
申请日期 |
1989.10.21 |
申请人 |
KURISUTARIYUUMU |
发明人 |
RINDA ESU PURANO;MAIKERU JII PIITAAZU;KURAMADOHATEI BUI RABUI;JIYON EMU PINEO |
分类号 |
C30B29/04;C23C16/27;C30B25/02;G03F1/22 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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