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发明名称
VORRICHTUNG UND VERFAHREN ZUR OBERFLÄCHENBEHANDLUNG VON SUBSTRATEN
摘要
申请公布号
AT431963(T)
申请公布日期
2009.06.15
申请号
AT20060829658T
申请日期
2006.12.15
申请人
GEBR. SCHMID GMBH + CO.
发明人
KAPPLER, HEINZ
分类号
H01L21/00;B05C1/08
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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MODIFIED CASTOR
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