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经营范围
发明名称
Method of ion implantation
摘要
申请公布号
US4946706(A)
申请公布日期
1990.08.07
申请号
US19890371976
申请日期
1989.06.27
申请人
OKI ELECTRIC INDUSTRY, CO., LTD.
发明人
FUKUDA, HISASHI
分类号
H01J37/08;H01J37/317
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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