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经营范围
发明名称
Turbo-molecular pump
摘要
申请公布号
US4946345(A)
申请公布日期
1990.08.07
申请号
US19890324514
申请日期
1989.03.16
申请人
EBARA RESEARCH CO., LTD.;EBARA CORPORATION
发明人
WATANABE, KATSUHIDE;INANAGA, SATOSHI
分类号
F04D19/04;F04D29/66;F16F7/108
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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