摘要 |
A gas bearing system for maintaining high static stiffness while damping high and low frequency vibrations. The system includes a bearing shoe having a primary reservoir which is supplied with gas through a primary restrictor, and an auxiliary reservoir. A secondary restrictor couples the primary reservoir to the auxiliary reservoir. Gas passes through ports from the primary reservoir into the gap between the bearing surface of the bearing shoe and a bearing surface of a rail. The secondary restrictor has a resistance to flow of gas therethrough greater than the resistance to flow of gas through the ports but less than the resistance to flow of gas through the primary restrictor. This arrangement provides damping over a larger frequency range than is known in the prior art. Such a system is particularly suitable for use in a gantry-type coordinate measuring machine.
|