PREVENTION OF INNER WALL CONTAMINATION OF VACUUM TREATMENT APPARATUS,申请号JP19890018420-传众专利搜索

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发明名称	PREVENTION OF INNER WALL CONTAMINATION OF VACUUM TREATMENT APPARATUS
摘要
申请公布号	JPH02198139(A)	申请公布日期	1990.08.06
申请号	JP19890018420	申请日期	1989.01.27
申请人	FUJITSU LTD	发明人	HIROTA SHIRO
分类号	C23C14/22;C23C14/00;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;H01L21/31	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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