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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02197177(A)
申请公布日期
1990.08.03
申请号
JP19890019255
申请日期
1989.01.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
AIGA MASAO;HAMAMOTO SATORU
分类号
H01L31/04
主分类号
H01L31/04
代理机构
代理人
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