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发明名称
THIN FILM TRANSISTOR AND MANUFACTURE THEREOF
摘要
申请公布号
JPH02196470(A)
申请公布日期
1990.08.03
申请号
JP19890015972
申请日期
1989.01.25
申请人
SEIKO INSTR INC
发明人
TANAKA HIDEO
分类号
H01L21/318;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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