发明名称 P-N-P DIAMOND TRANSISTOR
摘要 The present invention provides a P-N-P diamond transistor and a method of manufacture thereof. The transistor comprises a diamond substrate having two p-type semiconducting regions separated by an insulating region with an n-type semiconducting layer established by chemical vapour deposition. Preferably the p-type regions are obtained by doping with boron and controlling the concentration of nitrogen impurities by the use of nitrogen getters. The n-type layer preferably contains phosphorus.
申请公布号 CA2046284(A1) 申请公布日期 1990.08.02
申请号 CA19902046284 申请日期 1990.02.01
申请人 GERSAN ESTABLISHMENT 发明人 WELBOURN, CHRISOPHER M.
分类号 H01L21/20;H01L21/331;H01L29/16;H01L29/73;H01L29/735;(IPC1-7):H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
地址