摘要 |
PURPOSE:To reduce the amt. of impurities and oxygen entering starting materials for an AlN sintered body and to mix the starting materials in a short time by charging AlN powder and additives as the starting materials into a vessel provided with a stirring rods fitted to a rotating shaft and rotating the stirring rods in an inert gaseous atmosphere. CONSTITUTION:AlN powder and additives as starting materials for an AlN sintered body are charged into a vessel 1 provided with stirring rods 10 fitted to a rotating shaft 9, a lid 5 is fitted to the vessel 1 and an inert gas is filled into the vessel 1 from a feed hole 7. Then the stirring rods 10 are rotated by rotating the rotating shaft 9 at a high speed to mix the starting materials. |