Imaging device

摘要

To provide an imaging device that is highly stable when exposed to radiation such as X-rays. The imaging device includes a substrate, a pixel circuit, and a scintillator which are stacked in order. The pixel circuit includes a light-receiving element and a circuit portion electrically connected to the light-receiving element. The substrate is provided with a heater. A transistor in the pixel circuit is heated by the passage of a current through the heater at times other than imaging, thus, degradation of the electrical characteristics of the transistor due to X-ray irradiation can be recovered.

主权项

1. An imaging device comprising:
a substrate provided with a heater; a pixel array on the substrate, the pixel array including a plurality of pixel circuits, each pixel circuit comprising a light-receiving element, an imaging circuit portion electrically connected to the light-receiving element, a light-emitting element, and a light-emitting circuit portion electrically connected to the light-emitting element; and a scintillator on the pixel array.