| 摘要 |
PURPOSE:To extremely facilitate positioning of a sample, by attaching flat springs to a mirror body so that two sample stages rotate reversely to each other by thermal elongation/contraction of the flat springs, and by arranging two drive contact planes in parallel with flat springs respectively and coincident with an axis intersecting a light axis at right angle. CONSTITUTION:Since thermal expansions of the first sample stage 4 appear as radial expansions from a light axis Z serving as a center, drive contact planes 15, 16 only slide against each of rollers 19, 20 of levers 17, 18 and a sample 2 does not change its position. At the same time, the second sample stage 5 also thermally expands and rotates the sample stage 4 counter-clockwise through the first flat springs 7a, 7b. However, the sample 2 does not rotate because of the cancelling clockwise rotation of the sample stage 5 caused by the thermal expansion of the sample stage 4. If the rotation amounts of the sample stage 4 and the sample stage 5 rotated clockwise and counter-clockwise by the flat springs 7a, 7b and 9a, 9b are respectively arranged to be the same by selection the lengths of flat springs, the rotation of the sample 2 caused by the thermal expansions of respective flat springs can be prevented. |
