| 摘要 |
PURPOSE:To obtain a long-life, compact, and safe X-rays spare ionization excimer laser device by placing an X-rays generation source so that the X rays generated from a plurality of X-rays generation sources overlap in discharge space. CONSTITUTION:X rays generated from two X-rays generation sources 2 which are placed at the outside of a laser container 1 are overlapped at a discharge space 5. Thus, dosage of X rays generated from each X rays generation source can be made half as compared with the case when using only single X-rays generation source. |
