| 摘要 |
PURPOSE:To drive a cantilever part with acceleration from a root part in a nondestructive direction by charging the 1st electrode of the cantilever part formed by boring a silicon substrate and the 2nd electrode of the internal bottom part of the sealing member of the cantilever part to the same polarity or different polarities. CONSTITUTION:The cantilever part 7 provided on the substrate (silicon substrate) 1 can be swung and displaced freely by a bored through groove bored. A piezoelectric resistance element (resistance type strain gauge) 10 is provided at the root of the cantilever part 7 and its acceleration is measured from the detection result of the element as to strain generated by the acceleration. Box- shaped sealing members 2 and 3 which seal the cantilever part 7 are provided on both main surfaces of the substrate 1, the cantilever part 7 is provide with the 1st and 2nd electrodes 11 and 12 of the 1st electrode, and the members 2 and 3 are provided with the electrodes 15 and 16 of the 2nd electrodes 3 and 4 opposite them. Then, a cantilever driving means 4 charges the 1st and 2nd electrodes to the same polarity of different polarities according to the detection result of the element 10 to move the cantilever part 7 in the opposite direction from the displacement direction of the acceleration. |
