发明名称 A METHOD FOR DEPOSITION OF AT LEAST ONE ELECTRICALLY CONDUCTING FILM ON A SUBSTRATE
摘要 A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets.
申请公布号 EP2387803(B1) 申请公布日期 2016.07.13
申请号 EP20100701733 申请日期 2010.01.11
申请人 PHILIPS LIGHTING HOLDING B.V.;FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 BERTRAM, DIETRICH;KRIJNE, JOHANNES;SCHWAB, HOLGER;YOUNG, EDWARD, W., A.;GASSER, ANDRES;WISSENBACH, KONRAD;VEDDER, CHRISTIAN;PIRCH, NORBERT;STOLLENWERK, JOCHEN, H.;VAN BUUL, JEROEN, H., A., M.
分类号 H01L51/00;H05K3/10 主分类号 H01L51/00
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