摘要 |
A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets. |
申请人 |
PHILIPS LIGHTING HOLDING B.V.;FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BERTRAM, DIETRICH;KRIJNE, JOHANNES;SCHWAB, HOLGER;YOUNG, EDWARD, W., A.;GASSER, ANDRES;WISSENBACH, KONRAD;VEDDER, CHRISTIAN;PIRCH, NORBERT;STOLLENWERK, JOCHEN, H.;VAN BUUL, JEROEN, H., A., M. |