发明名称 |
Fine adjustment mechanism for a scanning tunneling microscope |
摘要 |
A fine adjustment mechanism for a scanning tunneling microscope includes a mounting member, a cylindrical piezoelectric element fixed to the mounting member at one end of the element, a probe provided at the other end of the piezoelectric element, and electrodes disposed on the inner and outer walls of the piezoelectric element, one of the electrodes being divided into a plurality of electrode groups in the longitudinal direction of the piezoelectric element.
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申请公布号 |
US4945235(A) |
申请公布日期 |
1990.07.31 |
申请号 |
US19880233741 |
申请日期 |
1988.08.19 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NISHIOKA, TADASHI;YASUE, TAKAO;KOYAMA, HIROSHI |
分类号 |
G02B7/04;G01B21/30;G01N37/00;G01Q10/04;G01Q60/10;G01Q60/16;H01J37/28;H01L41/09 |
主分类号 |
G02B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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