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发明名称
PATTERN DETECTOR
摘要
申请公布号
JPH02191314(A)
申请公布日期
1990.07.27
申请号
JP19890234596
申请日期
1989.09.12
申请人
NIKON CORP
发明人
HAZAMA JUNJI;TANIMOTO SHOICHI;KATO KINYA;IZAWA HISAO
分类号
G01B11/24;G01B11/245;G03F9/00;H01L21/027;H01L21/30
主分类号
G01B11/24
代理机构
代理人
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