| 摘要 |
<p>PURPOSE:To lessen the capacity of an external storage device or to prevent an error of input due to a hand by a method wherein information to show the classification and function of a semiconductor wafer is read by a semiconductor wafer screening device and a screening of the wafer is performed. CONSTITUTION:A semiconductor wafer screen 1 has a semiconductor wafer 1 to be screened having a recording region, where information to show the wafer's own classification or information to show the wafer's own function is recorded physically, optically or magnetically, a wafer information read device 5 to read information from the wafer 11 and a control device 2 to perform the device's own control using read control information. The wafer 11 is set on the screen 1, a functional test pattern 8 recorded magnetically at the wafer information recording region 15 on the rear of the wafer 11 is inputted in a functional test device 6 through the device 5 and at the time of a functional test, a screening of the wafer is performed by control of the device 2 using this pattern 8. Thereby, a saving of the capacity of an external storage device and an error of screening of different types, which is caused by the pattern 8, can be prevented.</p> |
