ELECTRONIC BEAM EXPOSURE DEVICE,申请号JP19890008684-传众专利搜索

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发明名称	ELECTRONIC BEAM EXPOSURE DEVICE
摘要
申请公布号	JPH02191315(A)	申请公布日期	1990.07.27
申请号	JP19890008684	申请日期	1989.01.19
申请人	MITSUBISHI ELECTRIC CORP	发明人	NOGUCHI HIROSHI
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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