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发明名称
SUSCEPTOR AND SUSCEPTOR DEVICE, AND WAFER DELIVERY METHOD FROM SUSCEPTOR
摘要
申请公布号
JPH02191356(A)
申请公布日期
1990.07.27
申请号
JP19880311337
申请日期
1988.12.09
申请人
KYUSHU ELECTRON METAL CO LTD;OSAKA TITANIUM CO LTD
发明人
KUROKI KAZUNORI
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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