FORMATION OF BURIED OXIDE FILM,申请号JP19890099313-传众专利搜索

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发明名称	FORMATION OF BURIED OXIDE FILM
摘要
申请公布号	JPH02191357(A)	申请公布日期	1990.07.27
申请号	JP19890099313	申请日期	1989.04.18
申请人	MITSUBISHI ELECTRIC CORP	发明人	HIRAO TADASHI
分类号	H01L21/762;H01L21/02;H01L21/265;H01L21/76;H01L27/12	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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