| 摘要 |
<p>PURPOSE:To make it possible to carry an X-ray mask highly accurately and safely even in a vacuum atmosphere by a method wherein a magnetic attraction holding mechanism is provided in addition to the main holding mechanism. CONSTITUTION:A magnetic unit, with which a magnetic material will be attracted, is provided in addition to the main mechanism which holds a retaining frame or a reinforcement member. Said magnetic unit is supported through the intermediary of a plate spring and the like in such a manner that it can be displaced against the mask having HG in the direction of attraction of a mask, a strain gauge is provided on the plate spring and the like, and the dis placement of the plate spring due to the impulse generated when mask magnetic substance MB is brought into contact with the magnetic unit is detected. In this case, the mask can be held stably by holding it with independently provided two holding systems even in a vacuum or low voltage atmosphere without generation of a distortion on the mask. Consequently, an X-ray mask can be conveyed in a highly precise manner.</p> |
