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发明名称
METHOD AND APPARATUS FOR ASHING
摘要
申请公布号
JPH02191325(A)
申请公布日期
1990.07.27
申请号
JP19890271857
申请日期
1989.10.20
申请人
FUJITSU LTD
发明人
SHINAGAWA KEISUKE;FUJIMURA SHUZO
分类号
H01L21/302;C23F4/00;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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