MEMS variable capacitor

摘要

Disclosed is a MEMS variable capacitor, the capacitor including a first electrode, a second electrode that is floated on an upper surface of the first electrode, and a third electrode capable of variably-adjusting a capacitance value by adjusting a gap between the first electrode and the second electrode.

主权项

1. A MEMS (micro-electromechanical system) variable capacitor, the capacitor characterized by: a first electrode;
a second electrode that is floated on the first electrode; and a fixed third electrode configured to variably adjust a capacitance value of the MEMS variable capacitor, wherein when a voltage is applied to the third electrode, a distance between the first electrode and the second electrode is increased in response to the applied voltage; wherein the second electrode is vertically disposed between the first electrode and the third electrode, and wherein a radio frequency (RF) signal is transmitted from the third electrode to the second electrode.