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发明名称
PLASMA CHEMICAL VAPOR DEPOSITION SI02-X COATED ARTICLES AND PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION METHOD OF APPLYING THE COATING
摘要
申请公布号
EP0200086(B1)
申请公布日期
1990.07.25
申请号
EP19860105164
申请日期
1986.04.15
申请人
OVONIC SYNTHETIC MATERIALS COMPANY, INC.
发明人
PAI, PURNACHANDRA;CHAO, BENJAMIN S.;HART, KEITH LAVERNE;TAKAGI, YASUO STANFORD UNIVERSITY;CUSTER, RUSS C.;MURATA, TOMOMI;ITO, SATOSHI
分类号
C23C16/50;C23C16/40;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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