发明名称 Process for etching organic polymeric materials.
摘要 <p>An improved process for etching of polymeric materials, in particular polyimide, by reaction with either an acid or alkaline etching solution is described. A reactive material, such as aluminium metal, is added to the etching solution in order to generate nascent hydrogen. The generation of this gas promotes the etching process by increasing the etching rate and dispersion of the etch residue.</p>
申请公布号 EP0378904(A1) 申请公布日期 1990.07.25
申请号 EP19890312447 申请日期 1989.11.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 YOULTON, HENRY GEORGE
分类号 C08J7/02;C08J7/12;C09K13/02;C09K13/04;H01L21/311;H05K1/03;H05K3/00;H05K3/06;H05K3/38 主分类号 C08J7/02
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