PARTICLE BEAM MEASURING METHOD FOR THE CONTACTLESS TESTING OF CIRCUIT NETWORKS

摘要

1. Particle beam measuring method for non-contact testing of interconnect networks for shorts and interruptions, in which a point (1) of a first interconnect network is charged within a first time span TC by use of a particle beam (PE) to a first potential VC , the particle beam (PE) subsequently being directed onto a number N of further points of the first or of a second interconnect network and remaining there for a second time span (TR ) in each case, characterized in that this second time span TR is dimensioned so that said time span satisfies the condition TR < TC /N, in that the potentials of the further points are determined by detecting the secondary electrons triggered in each case by the particle bean (PE), the energy of the particle beam (PE) having the same value during the first and the second time span (TC , TR ), and in that the potentials of the further points are compared with the first potential (VC ) in each case.