发明名称 |
METHOD FOR PRODUCING INSULATING FILM, INSULATING FILM, RESIN COMPOSITION FOR LASER ABRASION, AND ELECTRONIC COMPONENT |
摘要 |
The objective of the present invention is to provide a method for producing an insulating film, which uses a laser abrasion method, and wherein a resin film has high sensitivity to laser light. A method for producing an insulating film according to the present invention comprises: a step 1 wherein a resin film of a resin composition that contains a polyarylene (A) having a repeating structural unit represented by formula (A1) and a solvent (B) is formed on a substrate; a step 2 wherein the resin film is subjected to a heat treatment; and a step 3 wherein the resin film after heating is patterned by means of a laser abrasion method. (In formula (A1), Ar represents an aromatic ring; a hydroxyl group is a substituent bonded to the aromatic ring; R1 represents a substituent bonded to the aromatic ring, which is a halogen atom or an alkyl group having 1-10 carbon atoms, and if there are a plurality of R1 moieties, the R1 moieties may be the same as or different from each other; a represents an integer of 1 or more; and b represents an integer of 0 or more.) |
申请公布号 |
WO2016132784(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
WO2016JP50972 |
申请日期 |
2016.01.14 |
申请人 |
JSR CORPORATION |
发明人 |
DOI, Takashi;NISHIMURA, Isao |
分类号 |
G03F7/36;G03F7/039;H01L21/312;H05K1/03;H05K3/00 |
主分类号 |
G03F7/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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