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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02189927(A)
申请公布日期
1990.07.25
申请号
JP19890009032
申请日期
1989.01.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATSUMA KAZUMASA;ODA TAKESHI;YOSHIZAWA MASAO;TERAJIMA TOMOHIDE;YAMAGUCHI HIROSHI
分类号
H01L29/73;H01L21/331;H01L21/8222;H01L27/06;H01L29/732
主分类号
H01L29/73
代理机构
代理人
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地址
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